Huizhou Tian Yi Rare Material Co.,Ltd

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1. rare earth oxide

稀土氧化物：

我公司主要稀土氧化物相关产品：

稀土氧化物粉稀土氧化抛光粉纳米级稀土氧化物稀土氧化物靶材稀土氧化物蒸发料

稀土氧化物粉：<25um, <10um等粒度

稀土氧化物靶材:长方，正方形，圆片，三角形，管状等按图加工孔，台阶

稀土氧化物蒸发料：不规则颗粒，块，圆粒药片状，圆棒，薄片，箔片

纳米级稀土氧化物：

稀土氧化抛光粉：

其它尺寸规格数量等按客户要求订制！

品名

纯度

可供状态

氧化镧 La2O3

La2O3/TREO: 99.99%, 99.999%, TREO: 99%

粉，靶材，蒸发料，纳米粉

氧化铈, CeO2

CeO2/TREO: 99.99%, 99.999%, TREO: 99%

粉，靶材，蒸发料，纳米粉, 抛光粉

氧化铈锆复合物

(Ce-Zr)O2, 99.9%

粉，靶材，蒸发料

氧化镨, Pr6O11

Pr6O11/TREO: 99.5%, 99.99%, TREO: 99%

粉，靶材，蒸发料，纳米粉

氧化钕, Nd2O3

Nd2O3/TREO: 99.5%, 99.99%, TREO: 99%

粉，靶材，蒸发料，纳米粉

氧化钐, Sm2O3

Sm2O3/TREO: 99.9%, 99.99%, TREO: 99%

粉，靶材，蒸发料，纳米粉

氧化铕, Eu2O3

Eu2O3/TREO: 99.99%, 99.999%, TREO: 99%

粉，靶材，蒸发料，纳米粉, 荧光粉

氧化钆, Gd2O3

Gd2O3/TREO: 99.99%, 99.999%, TREO: 99%

粉，靶材，蒸发料，纳米粉

氧化钺, Tb4O7

Tb4O7/TREO: 99.95%, 99.99%, TREO: 99%

粉，靶材，蒸发料，纳米粉

氧化镝, Dy2O3

Dy2O3/TREO: 99.9%, TREO: 99%

粉，靶材，蒸发料，纳米粉

氧化钬, Ho2O3

Ho2O3/TREO: 99.9%, TREO: 99%

粉，靶材，蒸发料，纳米粉

氧化铒, Er2O3

Er2O3/TREO: 99.5%, 99.9%, TREO: 99%

粉，靶材，蒸发料，纳米粉

氧化铥, Tm2O3

Tm2O3/TREO: 99.99%, TREO: 99%

粉，靶材，蒸发料，纳米粉

氧化镱, Yb2O3

Yb2O3/TREO: 99.99%, 99.999%, TREO: 99%

粉，靶材，蒸发料，纳米粉

氧化钇, Y2O3

Y2O3/TREO: 99.99%, 99.999%, TREO: 99%

粉，靶材，蒸发料，纳米粉, 抛光粉

氧化钪, Sc2O3

Sc2O3/TREO: 99.9%, 99.99%, 99.999%, TREO: 99%

粉，靶材，蒸发料，纳米粉

氧化镥, Lu2O3

Lu2O3/TREO: 99.99%, 99.999%, TREO: 99%

粉，靶材，蒸发料，纳米粉

2. 陶瓷靶材

TYR material supply all kinds of ceramic sputtering target , compound semiconductor target include Oxide sputtering target , Fluoride sputtering target , Boride sputtering target , Carbide sputtering target , Nitride sputtering target , Sulfide sputtering target , Selenide sputtering target , Silicide sputtering target , Telluride sputtering target , Antimonide sputtering target , Arsenide sputtering target ......

The available made method include hot pressing , HP, , hot/cold isostatic pressing , HIP, CIP, , and vacuum melting, vacuum sintering

Spec.: Diameter: 355.6mm , 14", max. Single piece Size: Length: <254mm, Width: <127mm, Thickness: >1mm, if larger size than this, we can do it as tiles joint by 45 degree or 90 degree.
Shape: discs, plate, rod, tube, sheet, Delta, Rotatable and per drawing

TYR will base on each different material to select the best way to made it and sure the finish ceramic sputtering target to be best.

Oxide Ceramic sputtering target :
Aluminum Oxide , Al2O3 Antimony Oxide , Sb2O3
Antimony:Tin Dioxide , Sb:SnO, ATO Barium Titanate , BaTiO3
Bismuth Oxide , Bi2O3 Cerium oxide , CeO2
Cerium fluoride , CeF3 Chromium Oxide ,CrO, Cr2O3
Copper Oxide , CuO Dysprosium Oxide , Dy2O3
Erbium Oxide , Er2O3 Europium Oxide , Eu2O3
Gadolinium Oxide , Gd2O3 Hafnium Oxide, HfO2
Holmium Oxide , Ho2O3 Indium Tin Oxide, In2O3-SnO2, ITO
Indium Zinc Oxide, In2O3-ZnO, IZO Indium Oxide , In2O3
Indium Gallium Zinc Oxide, IGZO , In2O3+Ga2O3+ZnO
Iron Oxide , Fe2O3, Fe3O4 Lanthanum Aluminate , LaAl2O3,
LSMO , La0.67Sr0.33MnO3
Lead Zirconate , PbZrO3 Lead Oxide, PbO
Lead Titanate , PbTiO3 Lead Zirconate , PbZrO3
Lead Zirconate-Titanate, PZT , PbZrO3 + PbTiO3
Lutetium Oxide , Lu2O3
Magnesium Oxide , MgO Molybdenum Oxide , MoO
Molybdenum Oxide , MoO3, Neodymium Oxide , Nd2O3,
Nickel Oxide, NiO Niobium Pentoxide , Nb2O5, Nb2Ox
Neodymium Oxide , Nd2O3, Nickel Oxide, NiO
Praseodymium Oxide , Pr6O11, Samarium Oxide , Sm2O3
Scandium Oxide , Sc2O3 Silicon Monoxide , SiO
Silicon Dioxide , SiO2 Strontium Titanate , SrTiO3,
Tantalum Pentoxide , Ta2O5, Terbium Oxide , Tb4O7
Thulium Oxide , Tm2O3 Titanium Oxide , Ti2O3, Ti3O5
Titanium Monoxide , TiO Titanium Dioxide , TiO2
Tungsten Oxide , WO3, WO2.9, WO3 doped Li2O
Vanadium Pentoxide , V2O5, VO2 Yttrium Oxide , Y2O3
Ytterbium Oxide , Yb2O3
Zinc Oxide , ZnO Zinc Aluminum Oxide, AZO , Al2O3-ZnO, ZnO-Al
Ga2O3 doped ZnO , GZO Zirconium oxide , ZrO2
ZrO2 - Y2O3 stabilized , YSZ, ZrO2 + SiO2

Fluoride Ceramic sputtering target
Aluminum Fluoride , AlF3 target
Barium Fluoride , BaF2 target
Cadmium Fluoride , CdF2 target
Calcium Fluoride, CaF2 target
Cerium Fluoride , CeF3 target
Dysprosium Fluoride , DyF3 target
Erbium Fluoride , ErF3 target
Lanthanum Fluoride, LaF3 target
Lithium Fluoride , LiF target
Magnesium Fluoride, MgF2 target
Neodymium Fluoride, NdF3 target
Potassium Fluoride , KF, target
Praseodymium Fluoride , PrF3 target
Lead Fluoride , PbF2 target
Sodium Fluoride , NaF target
Strontium Fluoride , SrF3 target
Samarium Fluoride , SmF3 target
Cryolite Na3AlF6 target
Ytterbium Fluoride , YbF3 target
Yttrium Fluoride , YF3target

Boride Ceramic sputtering target
Chromium Boride , Cr2B, CrB2, CrB, Cr5B3 target
Hafnium Boride , HfB2 target
Iron Boride , FeB target
Lanthanum Boride , LaB6 target
Molybdenum Boride , Mo2B, Mo2B5 target
Neodymium Boride , NdB, NdB2 target
Tantalum Boride , TaB, TaB2 target
Titanium Boride, TiB2 target
Tungsten Boride , WB, WB2, W2B5 target
Vanadium Boride , VB, VB2 target
Zirconium Boride , ZrB2 target

Carbide Ceramic sputtering target
Boron Carbide, B4C target
Chromium Carbide , Cr3C2, CrC target
Hafnium Carbide, HfC target
Molybdenum Carbide , Mo2C target
Niobium Nitride , NbC target
Silicom Carbide , SiC target
Tantalum Carbide , TaC target
Titanium Carbide, TiC target
Titanium Carbon Nitride , TiCN target
Tungsten Carbide , W2C, WC target
Tungsten Carbide Doped with Nickel , WC+Ni target
Tungsten Carbide Doped with Cobalt , WC+Co target
Vanadium Carbide , VC target
Zirconium Carbide, ZrC target

Nitride Ceramic sputtering target
Aluminum Nitride , AlN target
Boron Nitride, BN target
Hafnium Nitride, HfN target
Niobium Niride , NbN target
Silicom Nitride , Si3N4 target
Tantalum Nitride , TaN target
Titanium Carbon nitride , TiCN target
Titanium Nitride, TiN target
Vanadium Nitride , VN target
Zirconium Nitride , ZrN target

Sulfide Ceramic sputtering target
Cadmium Sulfide , CdS target
Copper Sulfide, CuS,Cu2S target
Indium Sulfide , In2S3 target
Iron Sulfide, FeS, FeS2 target
Lead Sulfide , PbS target
Manganese Sulfide, MnS2 target
Molybdenum Sulfide , MoS2 target
Niobium Sulfide , NbS2 target
Silver Sulfide , AgS. Ag2S target
Tantalum Suflfide , TaS2 target
Tin Sulfide , SnS, SnS2 target
Tungsten Sulfide , WS2 target
Zinc Sulfide , ZnS target

Silicide Ceramic sputtering target
Chromium Silicide , CrSi2 target
Cobalt Silicide , Co3Si target
Hafnium Silicide , HfSi2 target
Molybdenum silicide, MoSi2, Mo5Si3 target
Nickel Silicide , NiSi target
Niobium Silicide , Nb5Si3, NbSi2 target
Tantalum Silicide , Ta5Si3, TaSi2 target
Titanium silicide, Ti5Si3, TiSi2 target
Tungsten Silicide , WSi2 target
Vanadium silicide , V3Si, VSi2 target
Zirconium Silicide , ZrSi2 target

Selenide Ceramic sputtering target
Aluminum Selenide , Al2Se3 target
Antimony Selenide , Sb2Se3 target
Arsenic Selenide , As2Se3 target
Bismuth Selenide, Bi2Se3 target
Cadmium Selenide , CdSe target
Copper Selenide, CuSe, Cu2Se target
Gallium Selenide, Ga2Se3 target
Gernium Selenide, GeSe target
Indium Selenide, In2Se3 target
Lead Selenide, PbSe target
Molybdenum Selenide, MoSe2 target
Manganese Selenide, MnSe target
Niobium Selenide , NbSe2 target
Tantalum Selenide , TaSe2 target
Tungsten Selenide , WSe2 target
Zinc Selenide , ZnSe target

Antimonide sputtering target
Indium Antimonide , InSb target
Gallium Antimonide , GaSb target
Nickel Antimonide , NiSb target

Arsenide sputtering target
Indium Arsenide , InAs target
Tin Arsenide , SnAs target
Gallium Arsenide , GaAs target

Telluride sputtering target
Arsenic Telluride , As2Te3 target
Antimony Telluride, SbTe, Sb2Te3 target
Bismuth Telluride , Bi2Te3, BiTe target
Bismuth Antimony Telluride , Bi-Sb-Te target
Cadmium Telluride, CdTe target
Copper Telluride , CuTe, Cu2Te target
Gallium Telluride , GaTe target
Geranium Telluride , GeTe target
Geranium Antimony Telluride , Ge-Sb-Te target
Lead Telluride , PbTe target
Tin Telluride, SnTe target
Molybdenum Telluride, MoTe2 target
Niobium Telluride, NbTe2 target
Silver Telluride, Ag2Te target
Tantalum Telluride, TaTe2 target
Tungsten Telluride , WTe2, sputtering target
Zinc Telluride , ZnTe target

3. 稀土金属

金属铈 (Ce), Ce/TREM:99.5%, 99.9%, TREM:99%

金属镝(Dy)—Dy/TREM:99.9%, TREM: 99%

金属铒(Er)-Er/TREM:99.9%,TREM:99%

金属铕 (Eu)-Eu/TREM:99.95% and 99.99%, TREM:99%

金属钆(Gd)-Gd/TREM:99.95% and 99.99%, TREM:99%

金属钬(Ho)- Ho/TREM:99.9%, TREM: 99%

金属镧(La)-La/TREM:99.5% and 99.9%, TREM:99%

金属镥(Lu)- Lu/TREM:99.99%, TREM:99%

金属钕(Nd)-Nd/TREM:99.5% and 99.9%, TREM:99%

金属镨(Pr)-Pr/TREM:99.5%, TREM:99%

金属钪(Sc)-Sc/TREM:99.99%, TREM: 99%

金属钐(Sm)-Sm/TREM:99.9%, TREM:99%

金属铽(Tb)-Tb/TREM:99.95% and 99.99%, TREM:99%

金属铥(Tm)-Tm/TREM:99.99%, TREM:99%

金属镱(Yb)-Yb/TREM:99.99%, TREM:99%

金属钇(Y)-Y/TREM:99.9% and 99.99%,TREM:99%

产品形状: 不规则小粒, 大块, 锭,
做溅射靶材用: 平板, 薄片, 圆盘状, 圆环状, 棒状
做靶材用尺寸: 直径 Dia<300mm, 长<500mm x 宽<300mm
粉末状 (-40)目至 (-)325目

4. sputtering target

惠州天亿公司主要靶材产品是金属靶材,合金靶材,稀土金属靶材,稀土合金靶材,陶瓷用靶材.形状:棒,圆片,方片
Pure Metal Sputtering Targets
Aluminum/Al, Silver/Ag, Gold/Au, Lanthanum/La, Cerium/Ce, Cobalt/Co,Carbon/C, Chromium/Cr, Copper/Cu, Dysprosium/Dy, Erbium/Er, Gadolinium/Gd, Holmium/Ho, Hafnium/Hf , Indium/In, Iridium/Ir, Lutetium/Lu, Magnesium/Mg,Molybdenum/Mo, Niobium/Nb, Neodymium/Nd, Nickel/Ni, Praseodymium/Pr, Palladium/Pd, Platinum/Pt, Rhenium/Re, Ruthenium/Ru, Rhodium/Rh, Scandium/Sc, Silicon/Si, Samarium/Sm , Tantalum/Ta, Terbium/Tb, Titanium/Ti, Thulium/Tm, Vanadium/V, Tungsten/W, Ytterbium/Yb, Yttrium/Y, Zirconium/Zr
合金靶材:铽镝铁合金靶材, Al-Ag, Al-Si, Ag-Pt, Ag-Cu, Ce-Gd, Cu-Ce ,Ce-Sm ,Co-Zr , Co-Cr , Co-Ni , Co-Pd , Co-Fe , Cr-V , Cr-B , Cr-Cu , Dy-Fe , Gd-Fe , In-Sn , Ir-Rh , Ir-Pd , Ni-Fe , Ni-Ti , Ni-V , Ni-Cr , Mn-Ir , Mn-Fe ,Mn-Ni , Tb-Fe , Ti-Al, W-Si , Zr-Ti, Zr-Ni , Zr-Nb , Zr-Al , Zr-Cu , Zr-Y , Zr-Hf , Ga-As , Gd-Fe-Co , Nd-Dy-Fe-Co , Tb-Fe-Co , Co-Ni-Cr , Al-Si-Cu , Tb-Gd-Fe-Co . shape :Foil, Rod, Wire, Bar,Sheet, wafer ,Plate and < 0.5 mm Thin Film from rare earth and other electronic and optic materials.
3. Compound targets/ Ceramic Sputtering Targets:
TiO2, CaO, SiO, Ta2O5, La2O3, CeO2, Pr6O11, Nd2O3, Sm2O3 ,Eu2O3, Gd2O3, Tb4O7, Dy2O3, Ho2O3, Er2O3, Tm2O3, Yb2O3, Lu2O3, Sc2O3, Y2O3, CeF3, NdF3, YF3, LaF3, YbF3, MgF2, Nb2O5, ZnS, In2O3, ITO targets, Al2O3 ，CaF2， GaP ， LaAlO3, LiNbO3, LiTaO3, MgO, MgF2, SrTiO3, SiO2 , YSZ , HoBCO， ITO, MgO, SiC, SmBCO, SiO2，YBCO, ZnO, ZrO2
targets, the shape :Foil, Sheet, wafer ,Plate

5. rare earth oxide

1. Rare earth oxide: La2O3, CeO2, Pr6O11, Nd2O3, Sm2O3 ,Eu2O3, Gd2O3, Tb4O7, Dy2O3, Ho2O3, Er2O3, Tm2O3, Yb2O3, Lu2O3, Sc2O3, Y2O3, (Sm,Eu,Gd)2O3ㄛwe can supply this item with the quantity up from 50g, with the purity from 99%, 99.5%, 99.9%, ...